CMP, Often called thermal oxidation sprucing, makes use of MP along side chemical compounds to improve the MRR and improve area high quality [twenty]. Determine 2 illustrates the schematic of a normal CMP process [21]. The SiC wafer, which happens to be preset about the carrier, as well as sharpening https://x.com/Anumhsite/status/1809238105934971020
Sintered silicon carbide manufacturing process Options
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